Advantages of Helium and Neon Ion Beams for Intelligent Imaging

نویسندگان

  • Huimeng Wu
  • Shawn Mcvey
  • David Ferranti
  • Chuong Huynh
  • John Notte
  • Lewis Stern
  • Matthew S. Joens
  • James A. J. Fitzpatrick
  • Bernhard Goetze
چکیده

Scanning electron microscopy (SEM) has become a crucial tool to visualize the exterior morphology and surface structures for samples in both biology and material science. Conventional SEMs are usually limited by relative low resolution and charging effects. Carbon or metal coating is required for insulator samples to minimize charging effects. However, the coating layer can sometimes obscure miniscule surface details and the coating procedure may generate artifacts, which could be confused with the true ultrastrcuture.

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تاریخ انتشار 2014